Deformation of Single Crystals, Polycrystalline Materials, and Thin Films: A Review
نویسندگان
چکیده
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
چکیده ندارد.
15 صفحه اولNanomechanical study of amorphous and polycrystalline ALD HfO2 thin films
Thin films of hafnium oxide (HfO2) were deposited by atomic layer deposition (ALD). The structural properties of the deposited films were characterised by transmission electron microscopy (TEM) and X-ray diffraction (XRD). We investigated the effect of phase transformations induced by thermal treatments on the mechanical properties of ALD HfO2 using nanoindentation. The elastic modulus of the a...
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ژورنال
عنوان ژورنال: Materials
سال: 2019
ISSN: 1996-1944
DOI: 10.3390/ma12122003